Optical: systems and elements – Lens – With support
Patent
1997-05-30
1998-12-22
Ben, Loha
Optical: systems and elements
Lens
With support
359825, 359694, 359679, 2504922, 250548, 355 53, G02B 702
Patent
active
058525181
ABSTRACT:
Four specified lenses 22.sub.1 to 22.sub.4 of a plurality of lenses in a projection optical unit are subjected to special processing (astigmatic surface processing) so that asymmetric component aberration relative to an optical axis is generated. Each of the lenses 22.sub.1 to 22.sub.4 is held by each of secondary lens frames 20 set in each of primary lens frames 14. Each of the secondary lens frames 20 is constructed so that it can be rotated from the outside of a lens barrel 12. The asymmetric component aberration relative to the optical axis of an optical system comprising all lenses for constituting the projection optical unit 10 can be easily corrected by rotating a pair of two of the lenses 22 subjected to the astigmatic surface processing. The projection optical unit is used for a projection exposure apparatus.
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Hatasawa Masato
Ikeda Masatoshi
Ben Loha
Nikon Corporation
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