Projection optical system, illumination apparatus, and exposure

Details Projection optical system, illumination apparatus, and exposure Projection optical system, illumination apparatus, and exposure

1996-07-19

1999-11-16

Metjahic, Safet

Photocopying

Projection printing and copying cameras

Focus or magnification control

355 57, G03B 2752

Patent

active

059867442

ABSTRACT:
A projection optical system of the present invention comprises a shaping optical system which is disposed in an optical path between a first surface and a second surface on which an image of the first surface is formed and has a refractive power in only one of two directions which are perpendicular to an optical axis of the projection optical system and orthogonal to each other. This shaping optical system comprises a first lens group which has a refractive power in only one of the two directions which are orthogonal to each other and a second lens group which has a refractive power only in the direction in which the first lens group has the refractive power. Also, the shaping optical system relatively magnifies or reduces the image in one of the two directions orthogonal to each other within the second surface with respect to the image in the other direction and making image-forming positions of the images in the two directions orthogonal to each other within the second surface substantially coincide with each other.

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