Projection optical system for use in precise copy

Details Projection optical system for use in precise copy Projection optical system for use in precise copy

1987-03-11

1989-08-29

Arnold, Bruce Y.

350443, 350620, 350174, G02B 1708, G02B 2710

Patent

active

048611484

ABSTRACT:
A projection optical system for use in a precise copy which uses a pair of catadioptric optical systems consisting of convex mirrors, concave mirrors, and phase correction members is shown. Two catadioptric optical systems commonly use an entrance pupil on a coaxis and are coupled so as to respectively face the phase correction members. Each of the concave mirrors has an opening at the center. Each of the convex mirrors has no opening in one embodiment but has an opening portion at the center in another embodiment.

REFERENCES:
patent: 2327947 (1943-08-01), Warmisham
patent: 2344756 (1944-03-01), Warmisham
patent: 2380887 (1945-07-01), Warmisham
patent: 2683394 (1954-07-01), Polanyi et al.
patent: 2891437 (1959-06-01), Tripp
patent: 3325238 (1967-06-01), Geier
Optica Acta, 1981, vol. 28, No. 11, 1477-1484, by David R. Shafer.

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