Projection-optical system for use in a projection-exposure appar

Details Projection-optical system for use in a projection-exposure appar Projection-optical system for use in a projection-exposure appar

1997-08-07

1999-05-11

Epps, Georgia

Optical: systems and elements

Lens

Multiple component lenses

359756, G02B9/62

Patent

active

059034009

ABSTRACT:
Projection-optical systems are disclosed for projecting an image of a first object M onto a second object P. Each such projection-optical system comprises, in order from the first-object side: a positive first lens group; a negative second lens group comprising a pair of negative lens elements forming a pair of concave surfaces facing each other; a positive third lens group comprising a lens element, positioned nearest the second object within the third lens group, having a concave surface facing the second object; an aperture stop; a positive fourth lens group comprising a lens element, positioned nearest the first object within the fourth lens group, having a concave surface facing the first object; a negative fifth lens group comprising a pair of negative lens elements that form a pair of concave surfaces facing each other; and a positive sixth lens group. The projection-optical systems satisfy any of several quantitative conditions.

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