Projection optical system, exposure apparatus, and method of...

Optical: systems and elements – Lens – With field curvature shaping

Reexamination Certificate

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C355S067000

Reexamination Certificate

active

07843645

ABSTRACT:
This invention is a projection optical system which includes a plurality of lens groups and projects an image of a first object onto a second object. A bottom lens group of the plurality of lens groups which is positioned nearest to the second object is made of an isotropic crystal material having a refractive index of 1.6 or more and has a positive focal length. A curvature radius R (mm) of a surface of the bottom lens group which is located on the first object side and a center thickness d (mm) of the bottom lens group satisfy 3.0>R/d>1.6 and d<60.

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