Projection optical system, exposure apparatus and method...

Details Projection optical system, exposure apparatus and method... Projection optical system, exposure apparatus and method...

2008-04-29

2008-04-29

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S052000, C355S053000, C355S067000, C359S512000, C359S694000, C359S820000, C359S822000

Reexamination Certificate

active

11302155

ABSTRACT:
A projection optical system includes an optical element that includes and locally uses a reflective or refractive area that is substantially axially symmetrical around an optical axis, the optical element being rotatable around the optical axis.

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