Projection optical system, exposure apparatus and method...

Details Projection optical system, exposure apparatus and method... Projection optical system, exposure apparatus and method...

2006-02-28

2006-02-28

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S052000, C355S053000, C355S067000, C359S512000, C359S820000

Reexamination Certificate

active

07006194

ABSTRACT:
A projection optical system includes an optical element that includes and locally uses a reflective or refractive area that is substantially axially symmetrical around an optical axis, the optical element being rotatable around the optical axis.

REFERENCES:
patent: 5424552 (1995-06-01), Tsuji et al.
patent: 5836667 (1998-11-01), Baker et al.
patent: 5852518 (1998-12-01), Hatasawa et al.
patent: 6262793 (2001-07-01), Sasaya et al.
patent: 6359678 (2002-03-01), Ota
patent: 6522386 (2003-02-01), Nishi
patent: 6522392 (2003-02-01), Muller-Rissmann et al.
patent: 6678240 (2004-01-01), Geh et al.
patent: 6757051 (2004-06-01), Takahashi et al.
patent: 2002/0186359 (2002-12-01), Meisburger et al.
patent: 6-349702 (1994-12-01), None
patent: 11-243052 (1999-09-01), None

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