Projection optical system, exposure apparatus, and device...

Details Projection optical system, exposure apparatus, and device... Projection optical system, exposure apparatus, and device...

2007-05-29

2007-05-29

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

11365046

ABSTRACT:
A projection optical system for projecting a pattern on an object plane onto an image plane includes first to sixth reflective surfaces in order to reflect light from the object plane, wherein A1=θ21/θ11, B1=θ31/θ11, 1.5<A1<1.65, and 2.3<B1<2.5 are met. θ11is an angle on a predetermined plane between a principal ray and a plane normal to the first reflective surface at an incident position of the principal ray. θ21is an angle on the predetermined plane between the principal ray and a plane normal to the second reflective surface at an incident position of the principal ray. θ31is an angle on the predetermined plane between the principal ray and a plane normal to the third reflective surface at an incident position of the principal ray.

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