Projection optical system, exposure apparatus and device...

Photocopying – Projection printing and copying cameras – Illumination systems or details

Reexamination Certificate

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Details

C355S053000

Reexamination Certificate

active

07554649

ABSTRACT:
There is provided a projection optical system for projecting a pattern on an object surface onto an image surface in a reduced size. The projection optical system includes six reflective surfaces that includes, in order of reflecting light from the object surface, a first reflective surface, a second convex reflective surface, a third convex reflective surface, a fourth reflective surface, a fifth reflective surface and a sixth reflective surface, and an aperture stop along an optical path between the first and second reflective surfaces.

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patent: 2003/0076483 (2003-04-01), Komatsuda
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patent: 0 779 528 (1997-06-01), None
patent: 2001-185480 (2001-07-01), None
patent: 2002-006221 (2002-01-01), None
patent: WO 02/48796 (2002-06-01), None
patent: WO 03/005097 (2003-01-01), None

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