Projection optical system and projection exposure apparatus

Details Projection optical system and projection exposure apparatus Projection optical system and projection exposure apparatus

2007-07-03

2007-07-03

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Lens

With field curvature shaping

C359S726000, C359S727000

Reexamination Certificate

active

11473128

ABSTRACT:
A catadioptric projection optical system includes a first optical system, for receiving light from an object, a second optical system, for forming an image of the object on an image plane, and a third optical system disposed optically between the first optical system and the second optical system. The first, second and third optical systems have a common straight optical axis. The image of the object is projected onto the image plane through a plurality of real intermediate image formations, and a pupil plane of the catadioptric projection optical system is free of a void area.

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