Projection optical system and method of using such system for ma

Details Projection optical system and method of using such system for ma Projection optical system and method of using such system for ma

1997-06-13

1999-07-27

Lester, Evelyn A.

Optical: systems and elements

Lens

With field curvature shaping

359649, 359766, 355 53, G02B 300, G03B 2742

Patent

active

059300493

ABSTRACT:
A projection optical system is provided which forms an image of a first object onto a second object and includes, in order from the first object side:
a first positive lens group G1 with a subgroup G-1p having at least two positives lenses;
a second negative lens group G2 with a subgroup G-2n having at least three negative lenses;
a third lens group G3 with a subgroup G-3p having at least three positives lenses and one negative lens;
a four negative lens group G4 with a subgroup G-4n having at least three negative lenses;
a fifth positive lens group G5 with a subgroup G-5p having at least five positives lenses and having a positive lens G-5g arranged closer to the second object side than the subgroup G-5p and having a concave surface facing the second object side. The projection optical system provides an optimal range for the focal length and the preferable range of the radius of curvature for the concave surface R5g of the positive lens G-5g.

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