Projection optical system and exposure apparatus with the same

Details Projection optical system and exposure apparatus with the same Projection optical system and exposure apparatus with the same

2005-03-01

2005-03-01

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

06862078

ABSTRACT:
A projection optical system projects an image of a first surface onto a second surface, and has a lens component formed of fluorite and a lens component formed of silica, and further includes: a first lens group including at least one lens component formed of fluorite and having a positive refractive power; a second lens group which is arranged in an optical path between the first lens group and the second surface and which has a negative refractive power; and a third lens group which is arranged in an optical path between the second lens group and the second surface and having a positive refractive power; wherein when the number of the lens components formed of silica is Snum, the number of the lens components formed of fluorite is Cnum, and a numerical aperture of the second surface side of the projection optical system is NA, the following conditions are satisfied:in-line-formulae description="In-line Formulae" end="lead"?Snum>Cnum  (1)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?NA>0.75  (2).in-line-formulae description="In-line Formulae" end="tail"?

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