Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1997-07-28
1998-07-14
Moses, R. L.
Photocopying
Projection printing and copying cameras
Step and repeat
355 54, 359757, 359755, G02B 962, G03B 2742, G03B 2744
Patent
active
057812780
ABSTRACT:
The present invention relates to a both-side telecentric projection optical system and an exposure apparatus equipped with this projection optical system. In particular, the projection optical system has a structure for quite favorably correcting various kinds of aberration such as distortion in particular, while securing a relatively broad exposure area and a large numerical aperture.
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Kobayashi Misako
Matsuzawa Hitoshi
Suenaga Yutaka
Moses R. L.
Nikon Corporation
Virmani Shival
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