Projection optical system and exposure apparatus having the...

Details Projection optical system and exposure apparatus having the... Projection optical system and exposure apparatus having the...

2008-07-22

2008-07-22

Rutledge, Della J. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S071000, C378S034000, C378S035000

Reexamination Certificate

active

11282418

ABSTRACT:
A projection optical system used for an exposure apparatus to projecting a reduced size of an image of an object onto an image plane includes plural refractive elements that dispense with a reflective element having a substantial optical power, wherein the projection optical system forms an intermediate image.

REFERENCES:
patent: 5729331 (1998-03-01), Tanaka et al.
patent: 2006/0126048 (2006-06-01), Sumiyoshi
patent: 2004-022708 (2004-01-01), None

Affiliated with

Also associated with

Rating

Projection optical system and exposure apparatus having the... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Projection optical system and exposure apparatus having the..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection optical system and exposure apparatus having the... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3947944