Projection optical system and exposure apparatus

Details Projection optical system and exposure apparatus Projection optical system and exposure apparatus

2005-12-13

2005-12-13

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C359S859000

Reexamination Certificate

active

06975385

ABSTRACT:
A six-mirror catoptric projection optical system for projecting a reduced size of a pattern on an object onto an image plane includes first, second, third, fourth, fifth, and sixth mirrors from the image plane along an optical path, wherein the third and fourth mirrors are located between the fifth mirror and sixth mirror and wherein the catoptric projection optical system forms an intermediate image along the optical path from the third mirror to the fifth mirror.

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An Office Action issued from the Taiwanese Patent Office on May 4, 2005 for Appl. No. 092,131,116 and An English translation of the Taiwanese Office Action and TIPLO's Remarks.

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