Projection optical system, a projection exposure apparatus,...

Details Projection optical system, a projection exposure apparatus,... Projection optical system, a projection exposure apparatus,...

2005-06-28

2005-06-28

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Lens

With field curvature shaping

C359S754000

Reexamination Certificate

active

06912094

ABSTRACT:
A projection optical system that projects an image on a first side onto a second plane through a plurality of lenses includes the following elements in order from the first side to the second plane: a first lens group that has a negative refractive power, a second lens group that has a positive refractive power, a third lens group that has a negative refractive power, a fourth lens group that has an aperture stop in the optical path, and a fifth lens group that has a positive refractive power. A clear aperture of a lens surface or an outer diameter of a lens in the projection optical system has a relative maximum in the second lens group, a relative minimum in the third lens group, and a relative maximum in the third-fifth lens groups, and has only one significant minimum between the first side and the second plane.

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