Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-09-20
2005-09-20
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S055000, C359S683000
Reexamination Certificate
active
06947121
ABSTRACT:
The present invention is directed toward a high performance yet compact projection optical system that is both-sidedly telecentric, has the ability to minimize the reduction of image formation performance that occurs due to the absorption by the glass material used, can secure a sufficiently large numerical aperture and a broad exposure area, and has the ability to very favorably correct aberrations and especially distortion. In a projection optical system that projects a pattern of a first object onto a second object, comprising in order from the first object side, a positive first lens group, a negative second lens group, a positive third lens group, a negative fourth lens group, and positive fifth lens group that provides at least 2 negative lens compositions, and where the fifth lens group includes two lens planes that satisfy the expression φ/φexp≦3.5, and a first lens composition L59constituted of a first material that satisfies the expression n≦1.57, and where the entire projection optical system described above has two lens planes that satisfy the expression φ/φexp>3.5, and which includes a second lens composition L34constituted of a second material that satisfies the expression n>1.57.
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Nikon's news release entitled “Ordering to Start for Nikon's New Step-and-Repeat Exposure System NSR-SF100”; dated Nov. 29, 1999.
Finnegan, Henderson Farabow, Garrett and Dunner L.L.P.
Nguyen Henry Hung
Nikon Corporation
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