Projection optical system

Details Projection optical system Projection optical system

1987-04-28

1988-07-12

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

350442, 355 63, G03B 2742, G02B 1700

Patent

active

047573546

ABSTRACT:
A projection optical system for photolithography includes a refraction sub-system and a cata-dioptric sub-system optically connected to each other. The refraction sub-system extends at an object side. The cata-dioptric sub-system extends at an image side. The refraction sub-system is generally composed of refracting members. The cata-dioptric sub-system is generally composed of a phase compensating member, a concave mirror, and a convex mirror. The phase compensating member adjoins the refraction sub-system. At least the concave mirror has a central opening through which light passes. The light forms an image at a rear of the concave mirror.

REFERENCES:
patent: 2520633 (1950-08-01), Grey
patent: 4422754 (1983-12-01), Isohata et al.
patent: 4600265 (1986-07-01), Norrie

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