Projection optical system

Details Projection optical system Projection optical system

2007-09-11

2007-09-11

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S066000, C359S850000, C359S857000

Reexamination Certificate

active

10827968

ABSTRACT:
Disclosed is a projection optical system for projecting a pattern of a mask placed on an object plane, onto a substrate placed on an image plane. The projection optical system is arranged so that an intermediate image of the pattern formed on the mask, is formed between a third reflection surface and a fourth reflection surface. In accordance with a particular shape of the third reflection surface or with particular disposition, high-precision projection is ensured without enlargement in size of the whole system.

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patent: 6183095 (2001-02-01), Hudyma
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patent: 2004/0125353 (2004-07-01), Takahashi
patent: 0779528 (1997-06-01), None
patent: 2003-233001 (2003-08-01), None
patent: WO 0248796 (2002-06-01), None
European Search Report for Application EP 04252392, dated Apr. 27, 2006.
Official EPO Communication dated Feb. 9, 2007 in corresponding EOP Application No. 04 252 392.

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