Projection optical system

Details Projection optical system Projection optical system

2006-06-06

2006-06-06

Assaf, Fayez G. (Department: 2872)

Optical: systems and elements

Light interference

Produced by coating or lamina

C359S587000, C359S581000

Reexamination Certificate

active

07057820

ABSTRACT:
A projection optical system that projects a pattern on a first surface onto a second surface, and has a numerical aperture of 0.85 or higher includes an optical element, and an antireflection coating applied to the optical element, the antireflection coating including plural layers, an end layer having a refractive index of tan { sin−1(NA)} or greater, where NA is the numerical aperture of the projection optical system.

REFERENCES:
patent: 2005/0095539 (2005-05-01), Tsujita
patent: 2005/0225737 (2005-10-01), Weissenrieder et al.
patent: 0 994 368 (2000-04-01), None
patent: 2000-357654 (2000-12-01), None
patent: 2001-004803 (2001-01-01), None
English Abstract for Japanese Patent Laid Open Application No. 2001-004803.
Taiwanese Office Action with English Translation mailed Dec. 15, 2004.

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