Projection optical system

Details Projection optical system Projection optical system

1997-08-06

1999-09-21

Epps, Georgia

Optical: systems and elements

Lens

With field curvature shaping

G02B 300

Patent

active

059561823

ABSTRACT:
A projection optical system which has high efficiency and a wide exposure area is used to provide a desired image surface flatness and yet is of a practical size. A first element group including at least two pairs of convex surfaces facing each other, a second element group including at least two pairs of concave surfaces facing each other, a third element group including at least two pairs of convex surfaces facing each other, a fourth element group including at least two pairs of concave surfaces facing each other, and a fifth element group including at least two pairs of convex surfaces facing each other are provided, in that order, from a side of an object. Various predetermined conditions are satisfied.

REFERENCES:
patent: 3897138 (1975-07-01), Kano
patent: 5260832 (1993-11-01), Togino et al.
patent: 5636000 (1997-06-01), Ushida
patent: 5805344 (1998-09-01), Sasaya
patent: 5808814 (1998-09-01), Kudo

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