Projection optical apparatus capable of measurement and compensa

Details Projection optical apparatus capable of measurement and compensa Projection optical apparatus capable of measurement and compensa

1989-11-15

1990-07-24

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

356401, G01N 2186

Patent

active

049437330

ABSTRACT:
A projection optical apparatus has a projection optical system for projecting an image of a reticle pattern on a stage-mounted semi-conductor wafer and includes a light-emitting surface of the stage. A photoelectric detector receives light from the light-emitting surface through the projection optical system and the reticle. The stage is moved to move a projected image of the light-emitting surface relative to the reticle, and the positional relation between the projected image of the light-emitting surface and the reticle is determined. Numerical apertures of various components of the projection optical apparatus are set for optimal performance.

REFERENCES:
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patent: 4423959 (1984-01-01), Nakazawa et al.
patent: 4566796 (1986-01-01), Leebrick
patent: 4631416 (1986-12-01), Trutna, Jr.
patent: 4663534 (1987-05-01), Ayata et al.
patent: 4668089 (1987-05-01), Oshida et al.
patent: 4677301 (1987-06-01), Tanimoto et al.
patent: 4723845 (1988-02-01), Mizutani et al.

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