Projection optical apparatus

Details Projection optical apparatus Projection optical apparatus

1986-09-04

1987-11-03

Haroian, Harry N.

Optics: image projectors

Miscellaneous

355 53, 356152, G01B 1126

Patent

active

047040203

ABSTRACT:
A projection optical apparatus for projecting the pattern of a mask onto a substrate through a projection optical system includes a stage for supporting thereon a substrate having a plurality of marks for detection on the surface thereof, first detecting means for detecting the amount of inclination of the surface of the substrate relative to the surface on which the pattern is projected and imaged, through the projection optical system, second detecting means for detecting the amount of inclination of the surface of the substrate relative to a predetermined reference plane independently of the projection optical system, and calibrating means for calibrating the amount of inclination detected by the second detecting means on the basis of the amount of inclination detected by the first detecting means.

REFERENCES:
patent: 4540277 (1985-09-01), Mayer et al.
patent: 4558949 (1985-12-01), Uehara et al.
patent: 4577958 (1986-03-01), Phillips

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