Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Patent
1985-06-27
1987-05-26
Hayes, Monroe H.
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
355 53, 355 43, G03B 2752
Patent
active
046680772
ABSTRACT:
An optical apparatus for projecting the pattern of a photomask comprises light source means emitting radiation, an illuminating optical system for condensing the radiation from the light source means on the photomask, a projection optical system provided between the photomask and a predetermined plane to cause the pattern of the photomask illuminated by the illuminating optical system to be imaged on the predetermined plane, the projection optical system having an imaging optical characteristic varied by the radiation having entered through the photomask, thermometric means including a temperature detecting element producing an output corresponding to a temperature detected thereby, the thermometric means causing part of the radiation directed to the projection optical system by the illuminating optical system to act on the temperature detecting element, and means for producing an output signal corresponding to a variation in the imaging optical characteristic of the projection optical system on the basis of the output of the temperature detecting element.
REFERENCES:
patent: 4497015 (1985-07-01), Konno et al.
patent: 4498742 (1985-07-01), Uehara
Hayes Monroe H.
Nippon Kogaku K. K.
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