Projection optical apparatus

Details Projection optical apparatus Projection optical apparatus

1988-05-24

1989-01-31

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

355 53, 355 68, 356152, G03B 2752, G03B 2774, G03B 2780

Patent

active

048019771

ABSTRACT:
A projection optical apparatus comprises a projection optical system for projecting the image of an object onto a substrate, data collecting means for obtaining data regarding a factor which causes a variation in the optical characteristic of the projection optical system, adjusting means for adjusting the relation between the substrate and the image of the object relative to the variation in the optical characteristic of the projection optical system, means for determining the amount of adjustment by the adjusting means in accordance with a model formula using a predetermined parameter on the basis of the data obtained by the data collecting means, means for independently measuring the variation in the optical characteristic of the projection optical system, and means for correcting the parameter of the model formula on the basis of the result measured by the measuring means.

REFERENCES:
patent: 4391511 (1983-07-01), Akiyama et al.
patent: 4395117 (1983-07-01), Suzuki
patent: 4512657 (1985-04-01), Sakato
patent: 4629313 (1986-03-01), Tanimoto
patent: 4650983 (1987-06-01), Suwa
patent: 4666273 (1987-12-01), Shimizu et al.
patent: 4668077 (1987-05-01), Tanaka
patent: 4682037 (1987-07-01), Kosugi
patent: 4685805 (1987-08-01), Kodama et al.
patent: 4687322 (1987-07-01), Tanimoto et al.
patent: 4699505 (1987-10-01), Komoriya et al.
patent: 4711567 (1987-12-01), Tanimoto

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