Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2005-03-18
2011-11-22
Glick, Edward (Department: 2882)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000
Reexamination Certificate
active
08064040
ABSTRACT:
A projection objective for microlithography serves for imaging a pattern of a mask arranged in its object surface into an image field arranged in its image surface with a demagnifying imaging scale. It has a multiplicity of optical elements arranged along the optical axis of the projection objective, the optical elements being designed and arranged in such a way that the projection objective has an imageside numerical aperture NA>0.85 and a demagnifying imaging scale where |b|<0.05, and the planar image field having a minimum image field diameter suitable for microlithography of more than 1 mm.
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Bader Dieter
Dodoc Aurelian
Epple Alexander
Ulrich Wilhelm
Carl Zeiss SMT GmbH
Glick Edward
Persaud Deoram
Sughrue & Mion, PLLC
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