Projection objective for microlithography

Details Projection objective for microlithography Projection objective for microlithography

2006-12-26

2006-12-26

Spector, David N. (Department: 2873)

Optical: systems and elements

Lens

With field curvature shaping

C359S756000

Reexamination Certificate

active

07154677

ABSTRACT:
The invention relates to a projection lens comprising a lens assembly that has at least one first narrowing of the group of light beams. A lens with a non-spherical surface is located in front of and/or behind the first narrowing.

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