Projection objective

Details Projection objective Projection objective

2005-10-11

2005-10-11

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Lens

Multiple component lenses

C359S757000, C359S763000

Reexamination Certificate

active

06954316

ABSTRACT:
Projection exposure device and also projection objective with a lens arrangement which has at least one lens group of negative refractive power, this lens group comprising at least four lenses of negative refractive power, and a lens of positive refractive power being arranged after the third lens of negative refractive power in this lens group.

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