Projection measuring instrument

Details Projection measuring instrument Projection measuring instrument

2000-01-24

2000-11-14

Kim, Robert H.

Optics: measuring and testing

By polarized light examination

With light attenuation

356371, 356376, G01B 1130

Patent

active

061477583

ABSTRACT:
A projection measuring instrument requiring no exchange work of overlay chart for comparatively observing a workpiece image and a template is provided. For the object, a table (56) for a workpiece (55) to be put on, an observation optical system having a screen (1) and a projection lens (53) for projecting an image of the workpiece (55) onto the screen (1), a relative movement unit (57) for relatively moving the table (56) and the observation optical system, and a displacement sensor (61) for detecting relative movement displacement by the relative movement unit (57) are provided, the screen (1) being a liquid crystal display, the liquid crystal display having a display controller (2) for displaying a line drawing for measuring a profile of the workpiece (55) onto the liquid crystal display at a predetermined magnification.

REFERENCES:
patent: 4567478 (1986-01-01), Schwab
patent: 5886788 (1999-03-01), Kobayashi

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