Projection mask as well as a method and apparatus for the embedd

Details Projection mask as well as a method and apparatus for the embedd Projection mask as well as a method and apparatus for the embedd

1981-02-17

1983-06-28

Wintercorn, Richard A.

Photocopying

Contact printing

Frames

427259, 428209, 430 5, G03B 2728

Patent

active

043902731

ABSTRACT:
A projection mask and method and apparatus for production thereof comprising a substrate carrying a mask thereon, a cover glass covering the pattern mask and sealed at peripheral edges thereof to the substrate defining a space between the substrate with the mask and the cover glass. A particle-free fluid is provided in this space. A projection printing system projects illumination through such a projection mask into a light sensitive substrate.

REFERENCES:
patent: 3554641 (1971-01-01), Jeffee et al.
patent: 3877810 (1975-04-01), Feldstein
patent: 3893763 (1975-07-01), Orr
patent: 3895147 (1975-07-01), Ahn et al.
patent: 4049347 (1977-09-01), Smith, Jr.
patent: 4063812 (1977-12-01), Abraham et al.
patent: 4254174 (1981-03-01), Flanders et al.

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