Projection lens system and apparatus

Details Projection lens system and apparatus Projection lens system and apparatus

1998-04-27

1999-12-28

Lee, Eddie C.

Photocopying

Projection printing and copying cameras

Step and repeat

355 53, 355 67, 359649, 359713, 359658, G03B 2742

Patent

active

060088842

ABSTRACT:
A high-performance dioptric reduction projection lens and projection exposure apparatus and projection exposure method using same. The projection lens includes six lens groups and has a positive negative positive negative positive refractive power arrangement. The third and fifth lens groups have overall positive refractive power and include at least three lens elements having positive refractive power. The fourth lens group has negative refractive power and includes at least three lens elements having negative refractive power. At least one lens element in either the fourth lens group or the fifth lens group includes an aspheric surface. The projection lens preferably satisfies at least one of a number of design conditions.

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"Quality of Microlithographic Projection Lenses" by J. Braat, SPIE Proceedings, vol. 811, Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, H. Stover, S. Wittekoek, Eds., pp. 22-30 (Apr. 1987).

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