Projection lens system

Details Projection lens system Projection lens system

1991-10-22

1993-11-09

Henry, Jon W.

Optical: systems and elements

Lens

With variable magnification

359649, G02B 1324, G02B 960, G02B 962, G02B 964

Patent

active

052608328

ABSTRACT:
This invention relates to a projection lens system used for transferring circuit or other patterns from masks, etc. on which the circuit patterns are drawn onto semiconductor wafers by projection photolithography, and provides a projection lens system which makes high resolving power of the order of a few micrometers and wide exposure coverages compatible with each other. This projection lens system includes at least two sets of lens groups, each built up of lenses having concave surfaces located opposite to each other, and includes at least one lens surface of positive refractive power between said two sets of lens groups, said two sets of lens groups all satisfying the following conditions:

REFERENCES:
patent: 3951524 (1976-04-01), Doi et al.
patent: 3973831 (1976-10-01), Minoura
patent: 4037937 (1977-07-01), Minoura
patent: 4514049 (1985-04-01), Hirano
patent: 4976525 (1990-12-01), Matsumura et al.

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