Projection lens system

Details Projection lens system Projection lens system

1991-12-12

1992-12-08

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, 359742, G03B 2742

Patent

active

051702070

ABSTRACT:
The present invention relates to a projection lens system well-fit for baking integrated circuit patterns onto silicon wafers using a light source having wavelengths ranging from an ultraviolet wavelength zone to a vacuum ultraviolet wavelength zone. This projection lens system is characterized by comprising a plurality of lens elements including a Fresnel lens element having negative dispersion characteristics, said Fresnel lens being located at a position lying somewhere in said projection lens system with the exception of the pupil thereof and satisfying the following condition:

REFERENCES:
patent: 4891663 (1990-01-01), Hirose
patent: 4936665 (1990-06-01), Whitney
W. C. Sweatt, "Mathematical Equivalence Between a Holographic Optical Element and an Ultra-High Index Lens" J. Opt. Soc. Am., Mar. 1979, pp. 486-487.

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