Optics: image projectors – Epidiascope
Patent
1993-01-12
1994-04-26
Cuchlinski, Jr., William A.
Optics: image projectors
Epidiascope
353 76, 353DIG3, 353DIG4, 359369, G02B 2136, G03B 2108
Patent
active
053070984
DESCRIPTION:
BRIEF SUMMARY
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to a projection inspecting machine, in which an image to be measured can be projected onto a screen for observation inspection and in which the image to be measured can be observed more correctly through a microscope.
2. Background of the Prior Art
There has been known a projection inspecting machine. In this conventional inspecting machine, a projection lens mount attaching base is disposed above a table capable of moving two-dimensionally. This table serves to support an object to be measured placed on it. A projection lens mount attaching base constitutes a part of a projection optical system and is served as a base to which a projection lens is to be attached. An observation inspection is carried out by observing an image of the object to be measured, the object projected, in an enlarged scale, onto a screen by means of emission of an illumination light through a projection optical system.
In this conventional projection inspecting machine, it is an important point that an observation inspection is carried out rapidly and correctly with respect to the object to be measured based on the image thereof. To this end, attention is paid to a method as to how to improve the projection accuracy of an image of the object to be measured onto the screen. However, much difficulty is encountered. The reason is that some objects have surface colors and shapes which are difficult to be shown as an image. Examples of such colors and shapes are black, mat-finished plastic step, R surface, and the like. Since there is limit in intensity of illumination, resolution, transmission factor, etc., if the object to be measured has such unfavorable colors and/or shapes, the conventional projection inspecting machine has difficulty in exhibiting its measuring function to the full extent.
SUMMARY OF THE INVENTION
It is therefore an object of the present invention to provide a projection inspecting machine, in which an image to be measured can be projected onto a screen for observation inspection and in which the image to be measured can be observed more correctly through a microscope.
To achieve the above object, from one aspect of the present invention, there is essentially provided a projection inspecting machine comprising a table capable of moving two-dimensionally and adapted to support an object to be measured, and a projection lens mount attaching base constituting a part of a projection optical system, disposed above the table and adapted to serve as a base to which a projection lens is to be attached, an observation inspection being carried out by observing an image of the object to be measured, the object projected onto a screen by means of emission of an illumination light through the projection optical system, wherein a projection lens is removably attached so as to be exchanged by a microscope mount including an ocular optical system, a reference target being provided within a view field of the ocular optical system, the table being provided with a moving amount indicating portion capable of indicating a moving amount thereof.
From another aspect of the present invention, there is provided a projection inspecting machine comprising a table capable of moving two-dimensionally and adapted to support an object to be measured, and a projection lens mount attaching base constituting a part of a projection optical system, disposed above the table and adapted to serve as a base to which a projection lens is to be attached, an observation inspection being carried out by observing an image of the object to be measured, the object projected onto a screen by means of emission of an illumination light through the projection optical system, wherein the projection inspecting machine further comprises a microscope lens-barrel portion including an ocular optical system and mounted on a main body of the projection inspecting machine, and further with optical system switch means enabling to observe the object to be measured through the microscope lens-bar
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patent: 2209532 (1940-07-01), Michel
patent: 2477396 (1949-07-01), Weiskoof
patent: 2518240 (1950-08-01), Lowber et al.
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patent: 3572884 (1971-03-01), Chirayath
patent: 3900252 (1975-08-01), Disalvo et al.
patent: 4101194 (1978-07-01), Miyazaki et al.
patent: 4279482 (1981-07-01), Tyson
Cuchlinski Jr. William A.
Dowling William C.
Kabushiki Kaisha Topcon
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