Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2011-07-19
2011-07-19
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S067000
Reexamination Certificate
active
07982854
ABSTRACT:
The invention relates to a projection exposure system, in particular for micro-lithography. The projection exposure system according to the invention comprises a light source for producing light in the EUV region. The projection exposure system further comprises a first optical system for illuminating a mask by the light of the light source and a second optical system for imaging the mask on a component. At least one polarization-optical element is disposed on the beam path between the light source and the component.
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Dittmann Olaf
Gruner Toralf
Mann Hans-Juergen
Singer Wolfgang
Totzeck Michael
Carl Zeiss SMT GmbH
Fish & Richardson P.C.
Nguyen Hung Henry
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