Projection exposure method and projection exposure apparatus

Details Projection exposure method and projection exposure apparatus Projection exposure method and projection exposure apparatus

1997-09-17

1999-08-10

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

Focus or magnification control

355 53, 250548, 356401, G03B 2742, G03B 2186

Patent

active

059367113

ABSTRACT:
A focusing operation is performed so that the center of an exposure region on a photosensitive substrate coincides with a focal point of a projection optical system, based on setting information of a variable field stop, which sets the exposure region. Even in a case where only a portion of an exposable region of the projection optical system PL is set as the exposure region using the variable field stop, and only the set portion is subjected to exposure, exposure is performed while the set exposure region is brought into accurate focus, thereby improving resolution. Accordingly, an appropriate focusing operation can be always performed so as to achieve high accuracy exposure, irrespective of variations in the shape of the exposure region.

REFERENCES:
patent: 5241188 (1993-08-01), Mizutani
patent: 5424552 (1995-06-01), Tsuji et al.
patent: 5448332 (1995-09-01), Sakakihara et al.
patent: 5596204 (1997-01-01), Irie et al.
patent: 5635722 (1997-06-01), Wakamoto et al.
patent: 5661548 (1997-08-01), Imai

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