Projection exposure method and apparatus to determine optical pe

Details Projection exposure method and apparatus to determine optical pe Projection exposure method and apparatus to determine optical pe

1996-09-10

1997-11-11

Blankenship, Howard B.

Photocopying

Projection printing and copying cameras

Step and repeat

G03B 2742

Patent

active

056869843

ABSTRACT:
A projection exposure method wherein a semi-transparent material effective to partially transmit exposure light and also effective to change a phase of the exposure light is used to form a circuit pattern and a light blocking zone adjacent to the circuit pattern, on a transparent substrate to provide a reticle, the light blocking zone being constituted by a pattern not resolved by a projection optical system, and wherein the reticle is illuminated with the exposure light and is projected on a member to be exposed, through the projection optical system is disclosed. The method includes detecting light quantity of an image of the light blocking zone as formed through the projection optical system, comparing the result of the detection with a predetermined value, and discriminating appropriateness of performing an exposure process with the reticle, on the basis of the comparison.

REFERENCES:
patent: 5436692 (1995-07-01), Noguchi
patent: 5481332 (1996-01-01), Shiraishi

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