Projection exposure method and apparatus therefor

Details Projection exposure method and apparatus therefor Projection exposure method and apparatus therefor

1996-12-06

1999-06-29

Moses, Richard

Photocopying

Projection printing and copying cameras

Focus or magnification control

355 53, G03B 2742, G03B 2752

Patent

active

059175818

ABSTRACT:
Disclosed is a method for exposure by projection, having the step of determining an error in magnification of a projection optical system in a position at each of plural image heights of an image, a projection optical system being for projecting an image of a pattern of a mask onto a photosensitizable substrate; and the step of correcting a magnification of projection of the image of the pattern of the mask onto said photosensitizable substrate on the basis of the error in magnification determined in the previous step. Further disclosed is a projection exposure apparatus so adapted as to implement of the method for exposure by projection.

REFERENCES:
patent: 5105075 (1992-04-01), Ohta et al.
patent: 5696623 (1997-12-01), Fujie et al.
patent: 5710620 (1998-01-01), Taniguchi

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