Projection exposure mask acceptance decision system,...

Details Projection exposure mask acceptance decision system,... Projection exposure mask acceptance decision system,...

2007-01-16

2008-11-04

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Distortion introducing or rectifying

C355S055000, C430S005000

Reexamination Certificate

active

07446852

ABSTRACT:
A projection exposure mask acceptance decision system includes assurance object measuring unit to measure quality assurance objects relating to projection exposure mask, first exposure characteristic deterioration quantity calculating unit to calculate first exposure characteristic deterioration quantity caused by deviations in average values of the quality assurance objects measured by the measuring unit, second exposure characteristic deterioration quantity calculating unit to calculate second exposure characteristic deterioration quantity caused by dispersion in the quality assurance objects measured by the measuring unit, sum calculating unit to calculate simple sum of the first and second quantity, root sum square calculating unit to calculate root sum square of the first and second quantity, entire exposure characteristic deterioration quantity calculating unit to calculate entire exposure characteristic deterioration quantity as an interior division value of the simple sum and root sum square, and judgment unit to judge whether the entire exposure characteristic deterioration quantity is acceptable value.

REFERENCES:
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patent: 7008731 (2006-03-01), Nojima et al.
patent: 2004/0137340 (2004-07-01), Mimotogi et al.
patent: 2005/0132322 (2005-06-01), Inoue
patent: 2002-72440 (2002-03-01), None

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