Projection exposure device and position alignment device and...

Details Projection exposure device and position alignment device and... Projection exposure device and position alignment device and...

2005-08-09

2005-08-09

Smith, Zandra V. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C355S053000, C355S077000, C382S151000

Reexamination Certificate

active

06927854

ABSTRACT:
A mask mark is irradiated by an ultra-violet light source, thereby the image of the mark is passed through a lens and a half-mirror, then reflected by a mirror, thereafter further passed through a beam splitter and a lens, forming an image on a CCD. Then the center coordinate of the image is measured by a device, next, a board mark is illuminated by an infrared light source, and its image is passed through the mirror, the half-mirror, the beam splitter, a reflector, a lens, and a beam splitter, forming an image on a CCD. The positional alignment is implemented by moving the mobile stage in the XYθ directions based on the board mark on the infrared CCD and the mask mark on the ultra-violet CCD.

REFERENCES:
patent: 4641035 (1987-02-01), Suzuki et al.
patent: 4725737 (1988-02-01), Nakata et al.
patent: 5684565 (1997-11-01), Oshida et al.
patent: 5940528 (1999-08-01), Tanaka et al.
patent: 6760094 (2004-07-01), Shimada
patent: 6784979 (2004-08-01), Tajima et al.
patent: 6819406 (2004-11-01), Asami
patent: 6831730 (2004-12-01), Matsumoto et al.

Affiliated with

Also associated with

Rating

Projection exposure device and position alignment device and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Projection exposure device and position alignment device and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection exposure device and position alignment device and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3491948