Projection exposure device

Details Projection exposure device Projection exposure device

1991-06-07

1993-04-20

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 71, 355 93, G03B 2742

Patent

active

052047113

ABSTRACT:
In a projection exposure device in which an exposure light from a light source device is transmitted through a mask having a predetermined pattern formed therein and then an image of a mask pattern is focused by a projection lens on an exposure member held by a holding mechanism, an exposure light is emitted from the light source device along a horizontal optical axis. The mask, the projection lens and the exposure member are disposed on the horizontal optical axis and the holding mechanism is formed such that the exposure member is movable at least within a plane perpendicular to the horizontal optical axis. The distortion of the exposure member can be prevented to enable exposure at high accuracy and, also, with high throughput by holding the exposure member vertically, mask alignment is facilitated, the effect of heat from the light source can be minimized, and the size and the cost of the device can be reduced.

REFERENCES:
patent: 3383982 (1968-05-01), Moss
patent: 3494695 (1970-02-01), Sollima et al.
patent: 3497705 (1970-02-01), Adler
patent: 4189230 (1980-02-01), Zasio
patent: 4362385 (1982-12-01), Lobach
patent: 4448518 (1984-05-01), Nishida et al.
patent: 4662754 (1987-05-01), Mayer
patent: 4924257 (1990-05-01), Jain

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