Projection exposure apparatus with function to measure imaging c

Details Projection exposure apparatus with function to measure imaging c Projection exposure apparatus with function to measure imaging c

1995-12-14

1999-06-22

Moses, R. L.

Photocopying

Projection printing and copying cameras

Focus or magnification control

355 53, 355 67, G03B 2742, G03B 2752, G03B 2754

Patent

active

059147741

ABSTRACT:
In a projection exposure apparatus for projecting an image of a pattern on a reticle through a projection optical system onto a wafer, in order to quickly measure imaging characteristics of the projection optical system without actual exposure, an enlarging optical system consisting of an objective lens and a relay optical system, and an image pickup element are provided on a Z-stage on which the wafer is mounted. Illumination light illuminates an index pattern formed on the reticle to form an image thereof near a first lens in the objective lens through the projection optical system, the enlarging optical system enlarges the thus formed image of the index pattern to form an enlarged image thereof on a receiving surface of the image pickup element, the image pickup element converts it into a signal, and an image processing system processes the signal from the image pickup element, thereby measuring the imaging characteristics of the projection optical system, based on the processing results.

REFERENCES:
patent: 4585342 (1986-04-01), Lin et al.
patent: 5121160 (1992-06-01), Sano et al.
patent: 5153916 (1992-10-01), Inagaki et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5483079 (1996-01-01), Yonezawa
patent: 5615006 (1997-03-01), Hirukawa et al.
patent: 5635722 (1997-06-01), Wakamoto et al.

Affiliated with

Also associated with

Rating

Projection exposure apparatus with function to measure imaging c does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Projection exposure apparatus with function to measure imaging c, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection exposure apparatus with function to measure imaging c will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1711429