Projection exposure apparatus with an aberration compensation de

Details Projection exposure apparatus with an aberration compensation de Projection exposure apparatus with an aberration compensation de

1991-10-01

1993-02-02

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Distortion introducing or rectifying

355 53, G03B 2768, G03B 2742

Patent

active

051841762

ABSTRACT:
A projective exposure apparatus for imaging a pattern formed on an original onto a substrate at a predetermined magnification to form a pattern image on the substrate includes an original support member, a substrate support member, and a projection lens disposed between these support members for imaging the pattern onto the substrate. In the projection exposure apparatus, a partial deviation of positions of portions of the pattern image from regular positions are obtained in at least one of the directions along and perpendicular to a surface of the pattern image, and the partial deviation is eliminated by deforming at least one of the original and the substrate based on the thus obtained result.

REFERENCES:
patent: 4666273 (1987-05-01), Shimizu et al.
patent: 4887283 (1989-12-01), Hosono
patent: 5008702 (1991-04-01), Tanaka et al.

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