Projection exposure apparatus including a condenser optical syst

Details Projection exposure apparatus including a condenser optical syst Projection exposure apparatus including a condenser optical syst

1995-01-24

1998-12-08

Reinhart, Mark J.

Incremental printing of symbolic information

Light or beam marking apparatus or processes

Scan of light

B41J 247

Patent

active

058477462

ABSTRACT:
A projection exposure apparatus includes a projection optical system for projecting a pattern of a first object onto a second object; a laser source; an optical integrator for forming a secondary light source from the laser source; and a condenser optical system for imaging the secondary light source behind the first object at positions different in a direction of an optical axis with respect to two different directions to illuminate the first object therewith.

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