Projection exposure apparatus having compact substrate stage

Details Projection exposure apparatus having compact substrate stage Projection exposure apparatus having compact substrate stage

1999-01-19

2000-12-12

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356363, 355 53, G01B 902

Patent

active

061606197

ABSTRACT:
The projection exposure apparatus is provided with a moving mirror (24X, 24Y) having a length Lm set so as to satisfy a relationship as represented by Lm<Dw+2BL, in which Dw is a diameter of a substrate stage (18) and BL is the distance between a projection center of an optical projection system (PL) and a detection center of a mark detection system (AS). The projection exposure apparatus having the moving mirror so set for its length Lm as to satisfy the above relationship can make the substrate stage (18) more compact in size and lighter in weight, thereby achieving improvements in performance of controlling the position of the substrate stage (18), as compared with a conventional exposure apparatus having a moving mirror set so as for its length to meet a relationship as represented by Lm>Dw+2BL.

REFERENCES:
patent: 5003342 (1991-03-01), Nishi
patent: 5243195 (1993-09-01), Nishi
patent: 5523841 (1996-06-01), Nara et al.

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