Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2005-10-25
2005-10-25
Ngo, Hoang (Department: 2852)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S052000, C355S053000
Reexamination Certificate
active
06958803
ABSTRACT:
A high-performance projection exposure apparatus and method which can adjust optical characteristics which are rotationally asymmetric with respect to the optical axis of projection optical system and which remain in the projection optical system. In exemplary embodiments, the projection exposure apparatus includes an illumination optical system, a projection optical system and a plurality of optical elements. The illumination optical system illuminates a first object, and the projection optical system projects an image of the first object onto a second object under a predetermined magnification. The optical elements are set between the first object and the second object, and has rotationally asymmetric powers with respect to an optical axis of the projection optical system. Consequently, the optical elements can correct an optical characteristic rotationally asymmetric with respect to the optical axis of the projection optical system remaining in the projection optical system.
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Partial Translation of CH-PS 504863.
Partial Translation of “ABC Der Optik”.
Partial Translation of “Lexikon der Optik”.
English-language translation of JP-A-59-144127.
English-language translation of JP-A-63-232320.
English-language translation of JP-A-63-6553.
Endo Kazumasa
Sasaya Toshihiro
Ushida Kazuo
Ngo Hoang
Nikon Corporation
Oliff & Berridg,e PLC
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