Photocopying – Projection printing and copying cameras – Plural
Patent
1994-12-05
1997-03-25
Braun, Fred L.
Photocopying
Projection printing and copying cameras
Plural
355 77, G03B 2744, G03B 2732
Patent
active
056149883
ABSTRACT:
A projection exposure apparatus and method having a projection optical system with a plurality of projection optical units and being excellent in matching between images formed through the respective projection optical units. First and second substrates are moved relatively to a projection optical system to project a pattern formed on the first substrate through the projection optical system onto the second substrate to effect exposure thereon. The projection optical system is provided with a plurality of projection optical units each forming a real-size erect image of the pattern formed on the first substrate on the second substrate. Each of the projection optical units has a plurality of reflective surfaces and is telecentric at least on an image side. The projection exposure apparatus also has a correcting mechanism disposed to correct an error of orientation between a plurality of images formed on the second substrate by the plurality of projection optical units.
REFERENCES:
patent: 5159172 (1992-10-01), Goodman et al.
patent: 5298939 (1994-03-01), Swanson et al.
patent: 5401934 (1995-03-01), Ainsworth et al.
Kato Kinya
Seki Masami
Braun Fred L.
Nikon Corporation
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