Photocopying – Projection printing and copying cameras – Detailed holder for original
Patent
1998-02-02
2000-07-25
Metjahic, Safet
Photocopying
Projection printing and copying cameras
Detailed holder for original
355 73, 356401, 318653, G03B 2762, G03B 2760, G01B 1100, G05B 106
Patent
active
06094255&
ABSTRACT:
A projection exposure apparatus controls the position of a mask so that the mask is in a desired position without reducing throughput even if the size of the mask is increased. For example, a controller adjusts the pressure of air blown from air holes so that a reticle is floated at a desired distance above a reticle floating plate. The controller also controls the driving of linear motors having stators and sliders, thereby adjusting the pressing force of control bars in contact with the sides of the floating reticle to press the sides of the reticle and control the two-dimensional position of the reticle. Therefore, it is possible to control a mask so that the mask is placed in a desired position without reducing throughput.
REFERENCES:
patent: 4485339 (1984-11-01), Trost
patent: 4506204 (1985-03-01), Galburt
patent: 5260580 (1993-11-01), Itoh et al.
patent: 5471279 (1995-11-01), Takizawa
patent: 5657130 (1997-08-01), Shirasu et al.
patent: 5906901 (1999-05-01), Tanimoto
The Bell System Technical Journal, (Step and Repeat Camera), Nov. 1970, Eastman Kodak, Rochester, New York, pp. 2158-2167.
Kim Peter P.
Metjahic Safet
Nikon Corporation
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