Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1998-12-07
2000-09-19
Gray, David M.
Photocopying
Projection printing and copying cameras
Step and repeat
355 67, G03B 2742, G03B 2754
Patent
active
061220361
ABSTRACT:
In a projection exposure apparatus and method in which a substrate is exposed with a projected image of a mask through a projection optical system, a table which is movable in a direction of an optical axis of the projection optical system in arranged at an image side of the projection optical system to hold the substrate. A tilt amount of the table is monitored, and position information of a mark on the table is detected, which changes in accordance with the tilt of the table. Information on the relationship between a displacement amount of the substrate and a plane perpendicular to the optical axis and the tilt angle of the substrate is obtained, based on the monitored tilt amount and the position information of the mark.
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Okumura Masahiko
Yamasaki Shigeru
Gray David M.
Nguyen Hung Henry
Nikon Corporation
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