Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1994-10-25
1998-03-10
Moses, R. L
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 53, 356399, 356400, 356401, 250548, H01L 2127, G03B 2732, G03B 2754, G03F 720
Patent
active
057267391
ABSTRACT:
A projection exposure apparatus includes a secondary light source forming device having a light entrance surface and a light exit surface, for receiving light from a light source with the light entrance surface and for forming a secondary light source at the light exit surface side, a light projecting system for projecting light from the secondary light source to an object plane, a pattern projecting system for projecting, onto an image plane, a pattern on the object plane irradiated with the light, a secondary light source adjusting device for changing a light intensity distribution of the secondary light source, and an illuminance correcting device for substantially correcting illuminance non-uniformness, asymmetric with respect to an optical axis, formed or to be formed on the image plane with the change of the light intensity distribution.
REFERENCES:
patent: 4589769 (1986-05-01), Matsuki
patent: 4947030 (1990-08-01), Takahashi
patent: 5305054 (1994-04-01), Suzuki et al.
patent: 5345292 (1994-09-01), Shiozawa et al.
patent: 5367404 (1994-11-01), Hayata
patent: 5463497 (1995-10-01), Muraki et al.
Canon Kabushiki Kaisha
Moses R. L
Virmani Shival
LandOfFree
Projection exposure apparatus and device manufacturing method us does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Projection exposure apparatus and device manufacturing method us, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection exposure apparatus and device manufacturing method us will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-143520